高精度定位滑台,能夠以20~40nm的高解析度控制毫米~數十毫米的行程。採用PiezoMotor的PiezoLEGS®驅動器,推力提供6N和20N兩種,即使在靜止狀態下,仍能維持與推力相同的保持力,確保靜止時的穩定性和對抗干擾的高定位精度。本體材質提供鋁製和不銹鋼製兩種選擇。
A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.
產品特點
Features
Features
- 設計輕薄,節省空間。
- 自發熱低。
- 適用於真空環境,無磁性。
- 內建線性編碼器,具有高重複精度。
- Space-saving with a slim body
- Generates less heat itself
- A type with a vacuum environment, a non magnetic type
- High positional repeatability with a built-in liner encoder
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軸向
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外觀
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行程
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解析度
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推力
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型號
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直線運動系列
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X軸
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±4 mm
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40 nm
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6 N
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LS1L60(F)-08B-06
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±8 mm
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20 nm、40 nm
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6 N、20 N
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LS1L90(F)-16□-□
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±12.5 mm
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20 nm、40 nm
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6 N、20 N
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LS1L120(F)-25□-□
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XY軸 |
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±8 mm
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40 nm
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6 N、20 N
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LS2K180-16B-□
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Z軸
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±6 mm
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20 nm、40 nm
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20 N
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LSVL90(F)-12□-20
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±1.5 mm
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20 nm、40 nm
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20 N
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LSVL90(F)-03□-20
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旋轉系列
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回轉
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±1°
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0.2 秒、0.4 秒
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20 N
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LS1C90-02□-20
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傾角 |
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±1°
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0.2 秒、0.4 秒
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20 N
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LS1G□90-02□-20
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產品應用實例
Application
Application
- 光學系統的高精度定位。
- 雷射光學元件的光軸調整。
- 精密測量。
- X射線/分析與測量設備。
- 顯微鏡用樣品台。
- 位置調整後需靜止保持的應用。
- High-accuracy positioning of an optical system
- Laser alignment
- Precision mapping measurement
- X-ray/analysis and measuring equipment
- Specimen stage for microscopes
- Application in which the object is to be held static after position adjustment
主要適用於需要精確定位或位置調整後需要斷電靜止保持的應用。
The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.
控制器
Controller for Piezo motor stage
Controller for Piezo motor stage

用於驅動和控制LS系列壓電馬達滑台的控制器。
控制器將控制電路和驅動器結構整合在一起。當將壓電馬達台連接到控制器時,可以使用ABZ相輸出的光學線性編碼器進行閉迴路控制。
我們提供1至4軸控制器,可透過LAN或RS485接口從電腦發送控制指令來輕鬆操作控制器,也支援將接口更改為RS232C接口。
控制器將控制電路和驅動器結構整合在一起。當將壓電馬達台連接到控制器時,可以使用ABZ相輸出的光學線性編碼器進行閉迴路控制。
我們提供1至4軸控制器,可透過LAN或RS485接口從電腦發送控制指令來輕鬆操作控制器,也支援將接口更改為RS232C接口。
This product is a controller intended to drive and control an Piezo motor stage. In the controller, a control circuit and a driver are structurally integrated. If a piezo motor stage is connected to the controller, it can perform closed control using an optical linear encoder with an ABZ-phase output. The user can easily operate the controller by transmitting a control command from the computer via LAN, RS485, USB or RS232C interface.
產品特點
Features
Features
- 內建控制板、驅動板及線性感測器插補器,並支援RS485鏈接,能夠實現多軸控制(依線性感測器而定)。
- 當1至4軸控制器連接後,能立即進行高解析度定位控制。
- 使用解析度為10nm的線性感測器和驅動解析度為1nm以下的驅動器進行驅動控制。
- 驅動解析度為1 nm以下,也可與精度較高的非標準線性感測器搭配使用。
- 內部控制板採用RS485進行連結,可支援多軸控制(最多127軸)。
- Space-saving with a slim body
- Generates less heat itself
- A type with a vacuum environment, a non magnetic type
- High positional repeatability with a built-in liner encoder
延伸閱讀
▌X軸滑台
|
型號
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軸向
|
行程
[mm] |
解析度
[nm] |
最大移動速度
[mm/sec] |
載重
[kg] |
外型尺寸
mm |
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LS1L60-08B-06
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X軸
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±4
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40
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5
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1
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60x80x24
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LS1L60F-08B-06
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X軸
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±4
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40
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5
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1
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60x80x24
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LS1L90-16A-06
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X軸
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±8
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20
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5
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2
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90x110x26
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LS1L90-16A-20
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X軸
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±8
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20
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5
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2
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90x110x26
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LS1L90F-16A-06
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X軸
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±8
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20
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5
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2
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90x110x26
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LS1L90F-16A-20
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X軸
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±8
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20
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5
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2
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90x110x26
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LS1L90-16B-06
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X軸
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±8
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40
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5
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2
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90x110x26
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LS1L90-16B-20
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X軸
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±8
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40
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5
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2
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90x110x26
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LS1L90F-16B-06
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X軸
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±8
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40
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5
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2
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90x110x26
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LS1L90F-16B-20
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X軸
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±8
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40
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5
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2
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90x110x26
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LS1L120-25A-06
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X軸
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±12.5
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20
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5
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3
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120x140x26
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LS1L120-25A-20
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X軸
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±12.5
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20
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5
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3
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120x140x26
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LS1L120F-25A-06
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X軸
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±12.5
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20
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5
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3
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120x140x26
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LS1L120F-25A-20
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X軸
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±12.5
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20
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5
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3
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120x140x26
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LS1L120-25B-06
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X軸
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±12.5
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40
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5
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3
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120x140x26
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LS1L120-25B-20
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X軸
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±12.5
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40
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5
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3
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120x140x26
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LS1L120F-25B-06
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X軸
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±12.5
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40
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5
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3
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120x140x26
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LS1L120F-25B-20
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X軸
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±12.5
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40
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5
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3
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120x140x26
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▌XY軸滑台
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型號
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軸向
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行程
[mm] |
解析度
[nm] |
最大移動速度
[mm/sec] |
載重
[kg] |
外型尺寸
mm |
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LS2K180-16B-06
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XY軸
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(X)±8,(Y)±8
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40
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5
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2
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210x180x36
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LS2K180-16B-20
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XY軸
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(X)±8,(Y)±8
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40
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5
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2
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210x180x36
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▌Z軸滑台
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型號
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軸向
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行程
[mm] |
解析度
[nm] |
最大移動速度
[mm/sec] |
載重
[kg] |
外型尺寸
mm |
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LSVL90-12A-20
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Z軸
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±6
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20
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5
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0.5
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120x90x34
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LSVL90F-12A-20
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Z軸
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±6
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20
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5
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0.5
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120x90x34
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LSVL90-12B-20
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Z軸
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±6
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20
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5
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0.5
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120x90x34
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LSVL90F-12B-20
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Z軸
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±6
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20
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5
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0.5
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120x90x34
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LSVL90-03A-20
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Z軸
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±1.5
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20
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1
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1
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90x90x48
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LSVL90F-03A-20
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Z軸
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±1.5
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20
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1
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1
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90x90x48
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LSVL90-03B-20
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Z軸
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±1.5
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20
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1
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1
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90x90x48
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LSVL90F-03B-20
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Z軸
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±1.5
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20
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1
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1
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90x90x48
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▌回轉・傾角型滑台
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型號
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軸向
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行程
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解析度
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最大移動速度
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載重
[kg] |
外型尺寸
mm |
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LS1C90-02A-20
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回轉
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±1°
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0.2秒
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12°/s
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2
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90x90x40
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LS1C90-02B-20
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回轉
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±1°
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0.4秒
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12°/s
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2
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90x90x40
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LS1GU90-02A-20
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傾角
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±1°
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0.1秒
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3.6°/s
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2
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90x90x25
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LS1GU90-02B-20
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傾角
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±1°
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0.2秒
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3.6°/s
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2
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90x90x25
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LS1GD90-02A-20
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傾角
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±1°
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0.1秒
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2.4°/s
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2
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90x90x25
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LS1GD90-02B-20
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傾角
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±1°
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0.2秒
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2.4°/s
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2
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90x90x25
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▌控制器
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型號
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軸向
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光學線性傳感器類型 |
控制介面 | 外型尺寸 [mm] |
| LC421A |
1
|
Renishaw製
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LAN,RS485(標準配備)
USB,RS232C(選配)
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W210×D228×H60
(不包括突起)
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| LC421B |
1
|
NanoControl製
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LAN,RS485(標準配備)
USB,RS232C(選配)
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W210×D228×H60
(不包括突起)
|
| LC422A |
2
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Renishaw製
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LAN,RS485(標準配備)
USB,RS232C(選配)
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W210×D228×H60
(不包括突起)
|
| LC422B |
2
|
NanoControl製
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LAN,RS485(標準配備)
USB,RS232C(選配)
|
W210×D228×H60
(不包括突起)
|
| LC443A |
3
|
Renishaw製
|
LAN,RS485(標準配備)
USB,RS232C(選配)
|
W210×D228×H60
(不包括突起)
|
| LC443B |
3
|
NanoControl製
|
LAN,RS485(標準配備)
USB,RS232C(選配)
|
W210×D228×H60
(不包括突起)
|
| LC444A |
4
|
Renishaw製
|
LAN,RS485(標準配備)
USB,RS232C(選配)
|
W210×D228×H60
(不包括突起)
|
| LC444B |
4
|
NanoControl製
|
LAN,RS485(標準配備)
USB,RS232C(選配)
|
W210×D228×H60
(不包括突起)
|
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