These are controllers intended to drive and control piezo stages. The controller, in which a control circuit, a driver and a displacement sensor amplifier are integrated, is directly connected with a piezo stage to provide closed-loop control. High-accuracy positioning with no hysteresis or creeping is achieved.

A “feedback control substrate,” a “low-noise driver substrate” and an “ultra-high resolution sensor amplifier substrate” are compactly modulated together and installed in the controller.

Since an analog voltage IF (0 to +10 V), a serial IF (RS232C), parallel IF (16-bit) and a USB/LAN are prepared, the customer can select an interface that is easy to use according to the purpose or use.※
※Options vary with models.

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