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對物調焦鏡專用滑台

PF 系列

These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.

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水平類型
Vertical type
專為物鏡焦點調整而設計的壓電平台。 透過將其整合到顯微鏡、各種檢查/測量設備和儀器中,可以加速鏡頭焦距的調整並提高其精確度。

These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.

 

可對應多種製造商的物鏡
Objective lenses of various manufacturers can be fitted.
  • 提供四種螺紋尺寸,以配合各製造商的鏡頭螺紋直徑。
  • 提供選購品:螺紋直徑轉接環。
  • 非標準鏡頭的安裝尺寸,請向我們諮詢。

 

  • Four thread sizes are selectable from in order to accommodate different manufacturers'lens thread diameters.
  • An optional thread diameter conversion adapter is also available.
  • Fitting of a non-standard lens is also negotiable.

 

 

提供4種類型
Four types are selectable
 橫型(水平)
  • 整體結構厚度降低。
  • 行程選擇豐富,適合需要長行程的應用。

【Horizontal type】
This type has a structure with a thin body.
Since it offers various strokes, it is recommended to select this type if a stage for a long travel distance is required.

 
 縱型
  • 剛性高,擁有較佳的響應性表現。
  • 適合使用較重或本體較長的鏡頭,可對應高速對焦需求。

【Vertical type】
This type has high rigidity and is focused on response.
It is suitable for cases where a heavy lens or a lens with a long tube is used, or cases where a high-speed focusing is desired.

 
 箱型
  • 採用以物鏡為中心的對稱雙面結構,即使較重的鏡頭也能穩定對焦。
  • 可透過4顆螺絲固定,適合整合到製造設備和檢測設備中。

【Box type】
This type has a double-supported structure that is symmetrical around the objective lens, and is capable of providing stable focusing even with a heavy lens.
This product can be securely installed and fixed with four screws, and 1s suitable for incorporation in a manufacturing system or an inspection device.

 
 鏡筒用
  • 可安裝於顯微鏡鏡筒,進行焦距方向的微調。

【For microscope tube】
With a microscope tube attached, it can be finely adjusted toward the focusing direction.

 

 

產品應用實例
Applications
  • 快速對焦
  • 影像處理設備
  • 共軛焦顯微鏡
  • 雷射加工
  • 半導體、FPD(flat-panel display)相關設備
  • 干涉儀測量

 

  • High-speed focusing
  • Image processors
  • Confocal microscopes
  • Laser processing
  • Semiconductor and FPD inspection devices
  • Interferometer shape measurement

 

 

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型號

 

形式

 

行程
[μm]

解析度
[nm]

反覆定位精度
[nm]

共振周波數[Hz]

PFHC***-015U

臥式

15

1

±1

950

PFHW***-015U

臥式

15

1

±1

680

PFHC***-100U

臥式

100

2

±2

520

PFHW***-100U

臥式

100

2

±2

430

PFHW***-200U

臥式

200

5

±5

370

PFHW***-300U

臥式

300

10

±10

300

PFHW***-400U

臥式

400

20

±20

240

PFVC***-100U

垂直型

100

2

±2

1000

PFVW***-100U

垂直型

100

2

±2

750

PFVW***-200U

垂直型

200

5

±5

490

PFB*-030U

箱型

30

1

±1

3100

PFB*-100U

箱型

100

2

±2

490

PFB*-300U

箱型

300

10

±10

210

PFR150-080U

鏡筒型

80

2

±2

590

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