超精密定位用壓電滑台－中空型直動滑台_ THK PRECISION

壓電滑台基本系列_中空型式
XYAxis With an opening model

壓電滑台中間開口的產品系列，適用於正/背檢、雷射穿透，結合顯微鏡及分析設備或儀器進行細微觀察、高精度測繪測量等。

Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.

從多軸薄型到大開口型
Available from a compact to large openings

提供適用於小型設備的多軸輕薄類型，和適合大尺寸面板的大開口類型。

The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned.

進行平滑且精確的掃描
Smooth and accurate scanning

透過高精度的回授控制，可根據指令訊號實現高可靠性的操作。

Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control.

產品有2種機構類型：
Classification of performances with two mechanisms

分為共振頻率高、強調高速響應的「直接驅動機構」和較長行程的「位移放大機構」。

The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke.

直接驅動機構
Direct-drive mechanism

壓電元件直接移動工作台的機構。
行程短，有優異的解析度和反應能力。
剛性高，即使在重負載下也能穩定定位。

A mechanism in which a piezo-electric elements directly moves the table.
It excels in resolution and response thanks to a short stroke.
With high rigidity, it is capable of performing stable positioning even under a large load.

位移放大機構
Displacement magnification mechanism

壓電元件進行驅動，具有設計行程放大機構提升壓電伸長率。
根據放大倍率，可獲得比直接驅動機構數倍至10倍以上的行程。
內藏位移感測器的回授控制，可以保持優秀的反覆定位精度。

The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element.
A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio.
Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained.

產品應用實例
Applications

探針掃描顯微鏡(AFM)
顯微鏡用載物台
光譜分析設備或儀器
半導體、FPD(flat-panel display)相關設備
曝光設備
測繪測量

SPM,AFM
Microscope tables
Spectroscopic instruments
Semiconductor & FPD-related inspections
Photolithography systems, Exposure devices
Mapping measurements

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THK PRECISION _ 超精密定位用壓電滑台_ 中空形式直動滑台_ 產品介紹PK系列

型號	軸向	行程 [μm]	解析度 [nm]	反覆定位精度 [nm]	共振周波數[Hz]	載重 [N]	外型尺寸 [mm]
PK1L40-020U-N	X	-	-	-	6600	5	40x70x10
PK1L60-030U	X	30	1	±1	2800	10	60×70×16
PK1L45-100U	X	100	2	±2	490	5	45×45×16
PK2H100-030U	XY	30	1	±1	2500	50	100×100×25
PK2H130-030U	XY	30	1	±1	1500	50	130×130×30
PK2H150-050U	XY	50	2	±2	1200	50	150×150×30
PK2L60-020U-N	XY	-	-	-	1700	10	60x60x10
PK2L100-080U	XY	80	2	±2	530	10	100×100×30
PK2L64-100U	XY	100	2	±2	300	10	64×64×30
PK2L76F-100U	XY	100	2	±2	240	10	76×76×32
PK2L130-100U	XY	100	2	±2	580	10	130×130×30
PK2L150-100U	XY	100	2	±2	420	10	150×150×30
PK2L150-200U	XY	200	5	±5	370	10	150×150×30
PK2L150-300U	XY	300	10	±10	240	10	150×150×30
PK2L280-200U	XY	200	5	±5	150	20	280×280×28
PKVH60-012U	Z	12	1	±1	2500	10	60×60×36
PKVL64F-100U	Z	100	2	±2	480	10	64×64×30
PKVL100-100U	Z	100	2	±2	480	10	100×100×30
PKVL84F-300U	Z	300	10	±10	210	10	84×84×30
PKVL60-100U	Z	100	2	±2	380	5	74×60×22
PKVL60-200U	Z	200	5	±5	350	5	74×60×22
PKMVL160-200U	Z	200	5	±5	150	10	160×240×24
PK3H130-030UA	XYZ	(X,Y) 30、(Z) 20	1	±1	820	10	130×130×30
PK3H150-050U	XYZ	(X,Y) 50、(Z) 30	(X,Y) 2、 (Z) 1	(X,Y) ±2、(Z) ±1	670	10	150×150×30
PK3L150-100UA	XYZ	(X,Y) 100、(Z) 30	(X,Y) 2、 (Z) 1	(X,Y) ±2、(Z )±1	430	10	150×150×30
PK3L150-100U	XYZ	(X,Y) 100、(Z) 100	(X,Y) 2、 (Z) 2	(X,Y) ±2、(Z) ±2	350	10	150×150×30
PK3L150-200UA	XYZ	(X,Y) 200、(Z) 100	(X,Y) 5、 (Z) 2	(X,Y) ±5、(Z) ±2	280	10	150×150×30
PK3L150-300UA	XYZ	(X,Y) 300、(Z) 100	(X,Y) 10、(Z) 2	(X,Y) ±10、(Z) ±2	210	10	150×150×30

如需產品圖檔，請洽廣億科技服務人員，謝謝！

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